Rensselaer researchers have developed a scanning electron microscopy based temperature mapping technique which employs a temperature sensitive electron signal for nano-scale resolution, non-contact measurement. It provides enhanced capabilities for investigating heat generation and transfer at the nanoscale to address long-standing issues related to power consumption, heat dissipation and energy conversion efficiency in many current and future generation nano-engineered systems. Applications include: Nano-scale heat generation and transfer studies in microelectronic, optoelectronic and micromechanical systems.