Curcumin and Curcuminoid Compounds, and Use Thereof as Photosensitizers of Onium Salts

Present microelectronic photoimaging applications employ onium salts for deep UV (I-line, 365 nm) photolithography. Since most onium salts do not absorb at this wavelength, photosensitizers are commonly employed. Polynuclear aromatic hydrocarbons are the most efficient known examples of electron-transfer photosensitizers for onium salts. However, they have serious drawbacks that limit their use, such as they are expensive, toxis, and poorly soluable in most reactive monomers and polymer systems.