FABRICATING RADIATION-DETECTING STRUCTURES

Solid state radiation detectors, such as neutron detectors and gamma ray detectors, have been proposed as alternatives to gas-tube based detectors. Radiation-detecting hetero-structures may be formed by using physical etching processes, such as reactive ion etching (RIE) to form trenches in a semiconductor substrate, followed by using chemical vapor deposition (CVD) to deposit radiation-detecting material within the formed trenches.